Title |
Controllable Si oxidation mediated by annealing temperature and atmosphere |
---|---|
Involved |
Feitao Li (Verfasser)
Dong Wang (Verfasser) Malte Klingenhof (Verfasser) Dominik Flock (Verfasser)
Honglei Wang (Verfasser)
Peter Strasser (Verfasser) Peter Schaaf (Verfasser) SpringerLink (Online service) (Sonstige) |
Published in |
Journal of materials science 57, 24, 14.6.2022, date:6.2022, Seite 10943-10952 |
Published |
2022 |
Language |
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Country |
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Topic |
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Subject |
Materials Science, general.
Characterization and Evaluation of Materials. Polymer Sciences. Solid Mechanics.
Crystallography and Scattering Methods.
Classical Mechanics. |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2022081602013394989179 (URN) |
Record ID |
1265469385 |
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