Title |
Technologieentwicklung und Charakterisierung von Through Silicon Carbide Vias (TSiCV) / Piotr Mackowiak ; Gutachter: Klaus-Dieter Lang, Stefan Schulz, Jens Müller ; Betreuer: Klaus-Dieter Lang |
|---|---|
Involved |
Piotr Mackowiak (Verfasser) |
Published |
Berlin: Technische Universität Berlin |
Extent |
Online-Ressource |
Thesis |
Dissertation, Berlin, Technische Universität Berlin, 2022 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2022091402045994323335 (URN) |
Record ID |
1267986069 |
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