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Annina M. Steinbach, Tanja Sandner, Boris Mizaikoff et al.

Gas phase silanization for silicon nanowire sensors and other lab‐on‐a‐chip systems

Published in: Physica status solidi : pss. C, Current topics in solid state physics 13, 4, 2016

Title

Gas phase silanization for silicon nanowire sensors and other lab‐on‐a‐chip systems

Involved 

Annina M. Steinbach (Verfasser)
Tanja Sandner (Verfasser)
Boris Mizaikoff (Verfasser)
Steffen Strehle (Verfasser)

Published in

Physica status solidi : pss. C, Current topics in solid state physics 13, 4, 2016, Seite 135-141

Published

19.11.2015

Language

Englisch

Country

Deutschland

Subject

microfabrication
silicon nanowire sensor
surface modification
organosilane

Persistent identifier

urn:nbn:de:101:1-2022111104372365761923 (URN)
10.1002/pssc.201510211 (DOI)

Record ID

1272514730
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