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Annina M. Steinbach, Samira B. Kazemi and Steffen Strehle

Solid–liquid–vapor etching of silicon nanostructures using hydrogen plasma

Published in: Physica status solidi. A, Applications and materials science 213, 11, 2016

Title

Solid–liquid–vapor etching of silicon nanostructures using hydrogen plasma

Involved 

Annina M. Steinbach (Verfasser)
Samira B. Kazemi (Verfasser)
Steffen Strehle (Verfasser)

Published in

Physica status solidi. A, Applications and materials science 213, 11, 2016, Seite 2921-2926

Published

03.11.2016

Language

Englisch

Country

Deutschland

Subject

bottom‐up synthesis
nanostructures
silicon
solid–liquid–vapor etching

Persistent identifier

urn:nbn:de:101:1-2022111106235261066029 (URN)
10.1002/pssa.201600374 (DOI)

Record ID

1272523101
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