Title |
Self‐Aligning Metallic Vertical Interconnect Access Formation through Microlensing Gas Phase Electrodeposition controlling Airgap and Morphology (Adv. Electron. Mater. 1/2023) |
|---|---|
Involved |
Leslie Schlag (Verfasser)
Nishchay Angel Isaac (Verfasser) Mohammad M. Hossain (Verfasser) Anna‐Lena Hess (Verfasser)
Benedikt C. Wolz (Verfasser)
Johannes Reiprich (Verfasser) Mario Ziegler (Verfasser) Jörg Pezoldt (Verfasser) Heiko O. Jacobs (Verfasser) |
Published in |
Advanced electronic materials 9, 1, 2023 |
Published |
10.01.2023 |
Language |
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Country |
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Persistent identifier |
urn:nbn:de:101:1-2023011114014367604984 (URN) |
Record ID |
1277787808 |
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