Title |
Thin Film Synthesis of Ti 3 SiC 2 by Rapid Thermal Processing of Magnetron‐Sputtered Ti C Si Multilayer Systems † |
|---|---|
Involved |
Marcus Hopfeld (Verfasser) |
Published in |
Advanced engineering materials 15, 4, 2013, Seite 269-275 |
Published |
18.10.2012 |
Language |
|
Country |
|
Persistent identifier |
urn:nbn:de:101:1-2023020109294360895337 (URN) |
Record ID |
127973115X |
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