Title |
New and promising precursors for chemical vapor phase processing of coinage metals, iridium and yttrium oxide thin films / Nils Boysen ; Gutachter: Anjana Devi, Thomas Riedl, Maarit Karppinen ; Fakultät für Chemie und Biochemie |
|---|---|
Involved |
Nils Boysen (Verfasser) |
Published |
Bochum: Ruhr-Universität Bochum |
Extent |
Online-Ressource |
Thesis |
Dissertation, Bochum, Ruhr-Universität Bochum, 2022 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
urn:nbn:de:hbz:294-95379 (URN) |
Record ID |
1281198455 |
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