Title |
Plasma affected 2DEG properties on GaN/AlGaN/GaN HEMTs |
|---|---|
Involved |
Stefanie Linkohr (Verfasser)
Wilfried Pletschen (Verfasser) Lutz Kirste (Verfasser) Marcel Himmerlich (Verfasser)
Pierre Lorenz (Verfasser)
Stefan Krischok (Verfasser) Vladimir Polyakov (Verfasser) Stefan Müller (Verfasser) Oliver Ambacher (Verfasser) Volker Cimalla (Verfasser) |
Published in |
Physica status solidi : pss. C, Current topics in solid state physics 9, 3‐4, 2012, Seite 938-941 |
Published |
29.02.2012 |
Language |
|
Country |
|
Subject |
plasma treatment |
Persistent identifier |
urn:nbn:de:101:1-2023022007113935272128 (URN) |
Record ID |
1281429309 |
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