Title |
Ultralow Expansion Glass as Material for Advanced Micromechanical Systems |
|---|---|
Involved |
Christoph Weigel (Verfasser)
Valeriya Cherkasova (Verfasser) Mathias Holz (Verfasser) Hai Binh Phi (Verfasser)
Christian Görner Tenorio (Verfasser)
Björn Wilbertz (Verfasser) Leonard Voßgrag (Verfasser) Thomas Fröhlich (Verfasser) Steffen Strehle (Verfasser) |
Published in |
Advanced engineering materials 22.02.2023 |
Published |
22.02.2023 |
Language |
|
Country |
|
Subject |
cantilever
glass-based microsystems microelectromechanical systems (MEMS) precision measurement
reactive ion etching
ultralow expansion glass |
Persistent identifier |
urn:nbn:de:101:1-2023022314052108418725 (URN) |
Record ID |
128176888X |
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