Title |
In-situ study of crack propagation in patterned structures of microchips using X-ray microscopy / Kristina Kutukova ; Gutachter: Ehrenfried Zschech, Dieter Schmeißer, Gerd Schneider |
|---|---|
Involved |
Kristina Kutukova (Verfasser) |
Published |
Cottbus: BTU Cottbus - Senftenberg |
Extent |
Online-Ressource |
Thesis |
Dissertation, Cottbus, BTU Cottbus - Senftenberg, 2023 |
Language |
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Country |
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Topic |
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Subject |
Rissausbreitung |
DDC notation |
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Persistent identifier |
urn:nbn:de:kobv:co1-opus4-62567 (URN) |
Record ID |
1283928809 |
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