Title |
A Combination of Ion Implantation and High‐Temperature Annealing: Donor–Acceptor Pairs in Carbon‐Implanted AlN |
|---|---|
Involved |
Lukas Peters (Verfasser)
Hendrik Spende (Verfasser) Stefan Wolter (Verfasser) Christoph Margenfeld (Verfasser) |
Published in |
Physica status solidi. A, Applications and materials science 30.03.2023 |
Published |
30.03.2023 |
Language |
|
Country |
|
Subject |
AlN |
Persistent identifier |
urn:nbn:de:101:1-2023033115201982859950 (URN) |
Record ID |
128506819X |
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