Title |
Electron devices based on ferroelectric hafnium oxide thin films / Thomas Kämpfe |
|---|---|
Involved |
Thomas Kämpfe (Verfasser) |
Published |
Dresden: TUDpress |
Extent |
x, 303 Seiten : Illustrationen |
Thesis |
Dissertation, Dresden University of Technology, 2021 |
ISBN |
978-3-95908-552-6 |
Language |
|
Country |
|
Topic |
|
Subject |
Sensorik |
Series |
Dresdner Beiträge zur Sensorik ; Band 85 |
Record ID |
1285698797 |
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