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Szilárd Kolozsvári, Peter Pesch, Carlos Ziebert et al.

Deposition and Characterization of Hard Coatings in the Material System V–Al–N by Reactive Magnetron Sputter Deposition

Published in: Plasma processes and polymers 6, S1, 2009, Eleventh International Conference on Plasma Surface Engineering (PSE2008) 1

Title

Deposition and Characterization of Hard Coatings in the Material System V–Al–N by Reactive Magnetron Sputter Deposition

Involved 

Szilárd Kolozsvári (Verfasser)
Peter Pesch (Verfasser)
Carlos Ziebert (Verfasser)
Michael Stueber (Verfasser)
Sven Ulrich (Verfasser)

Published in

Plasma processes and polymers 6, S1, 2009, Eleventh International Conference on Plasma Surface Engineering (PSE2008) 1, Seite S146-S151

Published

20.11.2009

Language

Englisch

Country

Deutschland

Subject
AlN
bias variation
hard coatings
magnetron sputtering
pressure variation
VAlN
VN

Persistent identifier

urn:nbn:de:101:1-2023042410325659234907 (URN)
10.1002/ppap.200930409 (DOI)

Record ID

1286800536
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