Title |
New wafer-level fabrication of ultrathin silicon insertion shuttles for flexible neural implants |
|---|---|
Involved |
Kirti Sharma (Verfasser)
Christian Böhler (Verfasser) Maria Asplund (Verfasser) Oliver Paul (Verfasser)
Patrick Ruther (Verfasser)
Albert-Ludwigs-Universität Freiburg. Institut für Mikrosystemtechnik (Mitwirkender) Albert-Ludwigs-Universität Freiburg. Professur für Materialien der Mikrosystemtechnik (Mitwirkender) Intelligent Machine-Brain Interfacing Technology (Mitwirkender) |
Published |
Freiburg: Universität |
Edition |
Akzeptierte Manuskriptversion |
Extent |
Online-Ressource |
Language |
|
Country |
|
Topic |
|
Subject |
Silicon thinning
Grinding Polyimide probes Ultrathin chips
Self-alignment
Backgrinding liquid wax |
Persistent identifier |
urn:nbn:de:bsz:25-freidok-2354979 (URN) |
Record ID |
1287582850 |
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