Title |
Transmission electron microscopy investigations on the recovery mechanisms of epitaxial AlN upon high-temperature annealing / Leonardo Cancellara ; Gutachter: Michael Kneissl, Philippe Vennéguès ; Michael Kneissl, Martin Albrecht |
|---|---|
Involved |
Leonardo Cancellara (Verfasser) |
Published |
Berlin: Technische Universität Berlin |
Extent |
Online-Ressource |
Thesis |
Dissertation, Berlin, Technische Universität Berlin, 2023 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2023060704240711784493 (URN) |
Record ID |
1292215739 |
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