Title |
3D investigation of dislocation development in semiconductor wafers by means of x-ray diffraction imaging |
|---|---|
Involved |
Merve Kabukcuoglu (Verfasser)
Andreas N. Danilewsky (Akademischer Betreuer) Tilo Baumbach (Akademischer Betreuer) Andreas N. Danilewsky (Sonstige)
Michael Fiederle (Sonstige)
Albert-Ludwigs-Universität Freiburg. Fakultät für Umwelt und Natürliche Ressourcen (Grad-verleihende Institution) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Thesis |
Dissertation, Universität Freiburg, 2022 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
urn:nbn:de:bsz:25-freidok-2282495 (URN) |
Record ID |
1294743554 |
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