Title |
Investigation of the Thermal Decomposition Mechanism and Kinetics of Molecules Relevant to Chemical Vapor Deposition in a Microreactor Using VUV i2PEPICO / Sebastian Grimm ; Betreuer: Burak Atakan |
|---|---|
Involved |
Sebastian Grimm (Verfasser) |
Published |
Duisburg, Essen: Universität Duisburg-Essen |
Extent |
Online-Ressource |
Thesis |
Dissertation, Duisburg, Essen, Universität Duisburg-Essen, 2023 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
urn:nbn:de:hbz:465-20230705-173451-2 (URN) |
Record ID |
1296339467 |
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