Title |
3D passive microfluidic valves in silicon and glass using grayscale lithography and reactive ion etching transfer |
|---|---|
Involved |
Hai Binh Phi (Verfasser)
Sebastian Bohm (Verfasser) Erich Runge (Verfasser) Lars Dittrich (Verfasser)
Steffen Strehle (Verfasser)
SpringerLink (Online service) (Sonstige) |
Published in |
Microfluidics and nanofluidics 27, 8, 22.7.2023, date:8.2023, Seite 1-12 |
Published |
2023 |
Language |
|
Country |
|
Topic |
|
Subject |
Engineering Fluid Dynamics. |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2023110209165852620206 (URN) |
Record ID |
1308321023 |
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