Title |
Simultan betriebene Hohlkathodenentladungen zur Deposition von wasserstoffhaltigen amorphen Kohlenstoffschichten in Sacklochgeometrien / Rafael Paul Gryga ; Sven Ulrich, Martin Dienwiebel |
|---|---|
Involved |
Rafael Gryga (Verfasser) |
Published |
Karlsruhe: KIT-Bibliothek |
Extent |
Online-Ressource |
Thesis |
Dissertation, Karlsruhe, Karlsruher Institut für Technologie (KIT), 2023 |
Language |
|
Country |
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Topic |
|
Subject |
Dünne Schicht |
DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2023110803584493032161 (URN) |
Record ID |
1309057737 |
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