Title |
Development of a highly-miniaturized single-shot point distance sensor and a spectrometer free areal optical confocal metrology system / vorgelegt von Korbinian Prause, M.Sc. ; Hauptberichter: Prof. Dr. rer. nat. Alois Herkommer |
|---|---|
Involved |
Korbinian Prause (Verfasser) |
Published |
Stuttgart: Institut für Technische Optik, Universität Stuttgart |
Extent |
xvi, 98 Seiten : Illustrationen, Diagramme |
Thesis |
Dissertation, Universität Stuttgart, 2023 |
ISBN |
978-3-948570-21-7 |
Language |
|
Country |
|
Topic |
Elektrotechnik, Elektronik |
Series |
|
Record ID |
1309738726 |
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