Title |
Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon |
|---|---|
Involved |
Sophie L. Pain (Verfasser)
Edris Khorani (Verfasser) Tim Niewelt (Verfasser) Ailish Wratten (Verfasser)
Marc Walker (Verfasser)
Nicholas Ewen Grant (Verfasser) John D. Murphy (Verfasser) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Language |
|
Country |
|
Topic |
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DDC notation |
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Persistent identifier |
urn:nbn:de:bsz:25-freidok-2462103 (URN) |
Further information |
ISSN: 2040-3372 |
Record ID |
1325462705 |
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