Title |
Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride / Ioannis Lampouras, Mathias Holz, Steffen Strehle, Julia Körner |
|---|---|
Involved |
Ioannis Lampouras (Verfasser) |
Published |
Hannover: Gottfried Wilhelm Leibniz Universität Hannover |
Extent |
Online-Ressource |
Language |
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Country |
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Topic |
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Subject |
batch-fabrication
cantilever sensors co-resonant sensitivity enhancement geometric eigenfrequency matching
microcantilever and high aspect ratio nanocantilever
microfabrication silicon nitride MEMS |
DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2024041102323216264257 (URN) |
Further information |
In: Lampouras, I.; Holz, M.; Strehle, S.; Körner, J.: Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride. In: Journal of Micromechanics and Microengineering 34 (2024), Nr. 1, 015005. DOI: https://doi.org/10.1088/1361-6439/ad0d80 |
Record ID |
1325796654 |
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