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Eberhard Manske (1956-)

Hochschullehrer

Name	Eberhard Manske
Time	1956- (Date of birth and death)
Place	Suhl (Geburtsort) Ilmenau (1982-2026) (Wirkungsort) Deutschland
Gender	männlich
Academic degree	Prof. Dr.-Ing.
Profession	Hochschullehrer (characteristic profession)
Related	Technische Universität Ilmenau. Fakultät für Maschinenbau Technische Hochschule Ilmenau
Further information	Stiftungsprofessur Präzisionsmesstechnik der Sartorius AG
Record type	Person
GND-Identifier	132799448
Record ID	132799448
Involved in show all Entwicklung eines Systems zum hochpräzisen und hochdynamischen Zwei-Photonen basierten direkten Laserschreiben Hochreproduzierbarer Wechsel von Tools auf Basis kinematischer Kopplungen Beiträge zum Direktlaserschreiben auf gekrümmten Oberflächen Enhanced vectorial measurement uncertainty model Metrology lasers for traceable length metrology in nanopositioning machines – towards a 10−¹² uncertainty level in vacuum wavelength Comparison of full fiber coupled interferometer systems under vacuum conditions Using micro spheres as reference artifacts for the in-situ characterization of tactile 3D micro probes along the probing sphere’s equator Prozessmesstechnik und Präzisionsmesstechnik Charakterisierung eines parallelkinematisch aktuierten In-situ -Referenzmesssystems für 5D-Nanomess- und Fabrikationsanwendungen An integrated exposure and measurement tool for 5-DOF direct laser writing Charakterisierung von Mikrokugeln auf der Basis von AFM-Oberflächenscans Introduction and application of a new approach for model-based optical bidirectional measurements Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100) Kombination aus Nanofabrikation und Nanometrologie auf einer planaren Ø100 mm Nanofabrikationsmaschine (NFM-100) Precision measurement and engineering at the 60th Ilmenau Scientific Colloquium Entwicklung von Mikrointerferometern mit Faserkopplung : Development of microinterferometers based with fiber coupling Entwicklung eines nephrologisch optischen Messverfahrens zur Bestimmung von Partikelkonzentrationen in Gasen und Flüssigkeiten hinter lichtstreuenden Kunststoffwandungen : Development of a nephrological optical measuring method for determining particle concentrations in gases and liquids behind light-scattering plastic walls Modular Direct Laser Writing setup for high precision nanostructuring Berührungslose kontinuierliche Topografiemessung auf bewegten Körpern feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres Resolution enhancement in Fabry-Perot interferometers through evaluation of multiple reflection using range-resolved interferometry Weiterentwicklung des Doppelendinterferometers der PTB : Längenmessung von Endmaßen ohne Anschub Correction: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes Ein Bottom-up Ansatz für die Radius- und Rundheitsmessung von Mikrokugeln Erweiterungen zum Aufbau eines zwei Photonen basierten direkten Laserschreibers zur großflächigen, hochpäzisen Nanostrukturierung Influence of form deviations on the radius and roundness measurement of micro spheres Comb-referenced metrology laser for interferometric length measurements in nanopositioning and nanomeasuring machines Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-,und Nanofabrikationsmaschinen Nachruf auf Prof. Rainer Grünwald Metrological nanopositioning combined with two-photon direct laser writing Absolute distance measurements for in-situ interferometer characterisation using range-resolved interferometry Measurement precision of a planar nanopositioning machine with a range of motion of Ø100 mm Silicon carbide - graphene nano-gratings on 4H and 6H semi-insulating SiC Foreword to the Special Issue on “Tip- and Laser-Based 3D Nanofabrication in Extended Macroscopic Working Areas” Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas Heterodyne Standing-Wave Interferometer with Improved Phase Stability A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine Direktes Laserschreiben auf Basis von Zwei-Photonen-Absorption mit metrologisch rückführbarer Positionierung Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz A heterodyne interferometer with separated beam paths for high-precision displacement and angular measurements Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base Foreword to the special issue on "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas" Fundamental investigations in the design of five-axis nanopositioning machines for measurement and fabrication purposes Heterodyne standing-wave interferometer with improved phase stability In-situ evaluation of the pitch of a reflective-type scale grating by using a mode-locked femtosecond laser Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz Phase-modulated standing wave interferometer Processing and analysis of long-range scans with an atomic force microscope (AFM) in combination with nanopositioning and nanomeasuring technology for defect detection and quality control Revisiting the limits of photon momentum based optical power measurement method, employing the case of multi-reflected laser beam Rigorous 3D modeling of confocal microscopy on 2D surface topographies Tip- and laser-based 3D nanofabrication in extended macroscopic working areas Two-photon direct laser writing beyond the diffraction limit using the nanopositioning and nanomeasuring machine Ganzheitliche Kalibrierung von Gewinden auf Basis eines dreidimensionalen Ansatzes Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

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Katalog der Deutschen Nationalbibliothek

Eberhard Manske (1956-)

Entwicklung eines Systems zum hochpräzisen und hochdynamischen Zwei-Photonen basierten direkten Laserschreiben

Hochreproduzierbarer Wechsel von Tools auf Basis kinematischer Kopplungen

Beiträge zum Direktlaserschreiben auf gekrümmten Oberflächen

Enhanced vectorial measurement uncertainty model

Metrology lasers for traceable length metrology in nanopositioning machines – towards a 10−¹² uncertainty level in vacuum wavelength

Comparison of full fiber coupled interferometer systems under vacuum conditions

Using micro spheres as reference artifacts for the in-situ characterization of tactile 3D micro probes along the probing sphere’s equator

Prozessmesstechnik und Präzisionsmesstechnik

Charakterisierung eines parallelkinematisch aktuierten In-situ -Referenzmesssystems für 5D-Nanomess- und Fabrikationsanwendungen

An integrated exposure and measurement tool for 5-DOF direct laser writing

Charakterisierung von Mikrokugeln auf der Basis von AFM-Oberflächenscans

Introduction and application of a new approach for model-based optical bidirectional measurements

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Kombination aus Nanofabrikation und Nanometrologie auf einer planaren Ø100 mm Nanofabrikationsmaschine (NFM-100)

Precision measurement and engineering at the 60th Ilmenau Scientific Colloquium

Entwicklung von Mikrointerferometern mit Faserkopplung : Development of microinterferometers based with fiber coupling

Modular Direct Laser Writing setup for high precision nanostructuring

Berührungslose kontinuierliche Topografiemessung auf bewegten Körpern

feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm

Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres

Resolution enhancement in Fabry-Perot interferometers through evaluation of multiple reflection using range-resolved interferometry

Weiterentwicklung des Doppelendinterferometers der PTB : Längenmessung von Endmaßen ohne Anschub

Correction: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

Ein Bottom-up Ansatz für die Radius- und Rundheitsmessung von Mikrokugeln

Erweiterungen zum Aufbau eines zwei Photonen basierten direkten Laserschreibers zur großflächigen, hochpäzisen Nanostrukturierung

Influence of form deviations on the radius and roundness measurement of micro spheres

Comb-referenced metrology laser for interferometric length measurements in nanopositioning and nanomeasuring machines

Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-,und Nanofabrikationsmaschinen

Nachruf auf Prof. Rainer Grünwald

Metrological nanopositioning combined with two-photon direct laser writing

Absolute distance measurements for in-situ interferometer characterisation using range-resolved interferometry

Measurement precision of a planar nanopositioning machine with a range of motion of Ø100 mm

Silicon carbide - graphene nano-gratings on 4H and 6H semi-insulating SiC

Foreword to the Special Issue on “Tip- and Laser-Based 3D Nanofabrication in Extended Macroscopic Working Areas”

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Heterodyne Standing-Wave Interferometer with Improved Phase Stability

A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine

Direktes Laserschreiben auf Basis von Zwei-Photonen-Absorption mit metrologisch rückführbarer Positionierung

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz

A heterodyne interferometer with separated beam paths for high-precision displacement and angular measurements

Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base

Foreword to the special issue on "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas"

Fundamental investigations in the design of five-axis nanopositioning machines for measurement and fabrication purposes

Heterodyne standing-wave interferometer with improved phase stability

In-situ evaluation of the pitch of a reflective-type scale grating by using a mode-locked femtosecond laser

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz

Phase-modulated standing wave interferometer

Processing and analysis of long-range scans with an atomic force microscope (AFM) in combination with nanopositioning and nanomeasuring technology for defect detection and quality control

Revisiting the limits of photon momentum based optical power measurement method, employing the case of multi-reflected laser beam

Rigorous 3D modeling of confocal microscopy on 2D surface topographies

Tip- and laser-based 3D nanofabrication in extended macroscopic working areas

Two-photon direct laser writing beyond the diffraction limit using the nanopositioning and nanomeasuring machine

Ganzheitliche Kalibrierung von Gewinden auf Basis eines dreidimensionalen Ansatzes

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers