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Christoph Schäffel (1961-2021)

Ingenieur

Name	Christoph Schäffel
Time	1961-2021 (Date of birth and death)
Place	Radeberg (Geburtsort) Ilmenau (Wirkungsort) Deutschland
Gender	männlich
Academic degree	Dr.-Ing.
Profession	Ingenieur (characteristic profession)
Variant	Christoph H. Schäffel
Related	Institut für Mikroelektronik- und Mechatronik-Systeme (Ilmenau) (1996-2021) Technische Universität Ilmenau Gerätetechnik (Studienfach)
Further information	Diss. Technische Universität Ilmenau, Fachgebiet Mikromechanik
Source	Traueranzeige: https://www.thueringen-gedenkt.de/traueranzeige/cristoph-schaeffel (Stand: 29.05.2021)
Record type	Person
GND-Identifier	132799863
Record ID	132799863
Involved in show all Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Kleinantriebe, Systemkomponenten, Auslegung Tip- and laser-based 3D nanofabrication in extended macroscopic working areas A lifting and actuating unit for a planar nanoprecision drive system Investigations on long-range AFM scans using a nanofabrication machine (NFM-100) Development of an integrated guiding and actuation element for high dynamic nanopositioning systems Vergleich der Scan-Performance bei Nanopositioniersystemen mit großem Bewegungsbereich Scan performance of nanopositioning systems with large travel range Design of an interferometric test station for parallel inspection of MEMS Untersuchungen zur Gestaltung integrierter Mehrkoordinatenantriebe

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Christoph Schäffel (1961-2021)

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Kleinantriebe, Systemkomponenten, Auslegung

Tip- and laser-based 3D nanofabrication in extended macroscopic working areas

A lifting and actuating unit for a planar nanoprecision drive system

Investigations on long-range AFM scans using a nanofabrication machine (NFM-100)

Development of an integrated guiding and actuation element for high dynamic nanopositioning systems

Vergleich der Scan-Performance bei Nanopositioniersystemen mit großem Bewegungsbereich

Scan performance of nanopositioning systems with large travel range

Design of an interferometric test station for parallel inspection of MEMS

Untersuchungen zur Gestaltung integrierter Mehrkoordinatenantriebe