Title |
Neuartige Aufreinigungsverfahren für die Elektronenstrahl-induzierte Abscheidung (FEBID) / Markus Rohdenburg ; Gutachter: Ivo Utke, Juraj Fedor ; Betreuer: Petra Swiderek |
|---|---|
Involved |
Markus Rohdenburg (Verfasser) |
Published |
Bremen: Staats- und Universitätsbibliothek Bremen |
Extent |
Online-Ressource |
Thesis |
Dissertation, Bremen, Universität Bremen, 2021 |
Language |
|
Country |
|
Topic |
|
Subject |
Chemie |
DDC notation |
|
Persistent identifier |
urn:nbn:de:gbv:46-elib47077 (URN) |
Record ID |
1338945238 |
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