Title |
Multiscale Fabrication and Characterization of a NEMS Force Sensor |
|---|---|
Involved |
Masoud Jedari Ghourichaei (Verfasser)
Umut Kerimzade (Verfasser) Levent Demirkazik (Verfasser) Bartosz Pruchnik (Verfasser)
Krzysztof Kwoka (Verfasser)
Dominik Badura (Verfasser) Tomasz Piasecki (Verfasser) Alp Timucin Toymus (Verfasser) Onur Aydin (Verfasser) Bekir Aksoy (Verfasser) Cemal Aydogan (Verfasser) Gokhan Nadar (Verfasser) Ivo W. Rangelow (Verfasser) Levent Beker (Verfasser) Arda Deniz Yalcinkaya (Verfasser) Halil Bayraktar (Verfasser) Teodor Gotszalk (Verfasser) Burhanettin Erdem Alaca (Verfasser) |
Published in |
Advanced Materials Technologies 31.08.2024 |
Published |
31.08.2024 |
Language |
|
Country |
|
Subject |
dynamic response
flow sensing force sensor gauge factor
microfabrication
silicon nanowire |
Persistent identifier |
urn:nbn:de:101:1-2409011405016.543145354068 (URN) |
Record ID |
1340714795 |
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