Title |
Thin film nanostructuring at oblique angles by substrate patterning / Sandra Muñoz-Piña, A. M. Alcaide, Blanca Limones-Ahijón, Manuel Oliva Ramírez, Victor Rico, German Alcalá, Maria U. González, Jose M. García-Martín, Rafael Alvarez, Dong Wang, Peter Schaaf, Agustin R. González-Elipe, Alberto Palmero, M.U. González, J.M. García-Martín, A.R. González-Elipe |
|---|---|
Involved |
Sandra Muñoz-Piña (Verfasser)
A. M. Alcaide (Verfasser) Blanca Limones-Ahijón (Verfasser) Manuel Oliva Ramírez (Verfasser)
Victor Rico (Verfasser)
German Alcalá (Verfasser) Maria U. González (Verfasser) Jose M. García-Martín (Verfasser) Rafael Alvarez (Verfasser) Dong Wang (Verfasser) Peter Schaaf (Verfasser) Agustin R. González-Elipe (Verfasser) Alberto Palmero (Verfasser) M.U. González (Verfasser) J.M. García-Martín (Verfasser) A.R. González-Elipe (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 12 Seiten |
Language |
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Country |
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Topic |
|
Subject |
Magnetron sputtering |
DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2409230310322.457190100645 (URN) |
Further information |
In: Surface and coatings technology(436) - ISSN 0257-8972 |
Record ID |
1342740297 |
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