Title |
Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces |
|---|---|
Involved |
Jeetendra Gour (Verfasser)
Sebastian Beer (Verfasser) Pallabi Paul (Verfasser) Alessandro Alberucci (Verfasser)
Michael Steinert (Verfasser)
Adriana Szeghalmi (Verfasser) Thomas Siefke (Verfasser) Ulf Peschel (Verfasser) Stefan Nolte (Verfasser) Uwe Detlef Zeitner (Verfasser) |
Published in |
Nanophotonics 13, 22, 2024, Seite 4191-4202 |
Published |
28.08.2024 |
Language |
|
Country |
|
Subject |
plasmonics
nanogap ALD nanotechnology
nanogap metasurfaces
sub-5 nm |
Persistent identifier |
urn:nbn:de:101:1-2409271751323.477030854689 (URN) |
Record ID |
1343372887 |
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