Title |
Wet chemical and plasma etching of photosensitive glass / Ulrike Brokmann, Christoph Weigel, Luisa-Marie Altendorf, Steffen Strehle, Edda Rädlein |
|---|---|
Involved |
Ulrike Brokmann (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 22 Seiten |
Language |
|
Country |
|
Topic |
|
Subject |
infrared spectroscopy
lithium metasilicate microstructuring photosensitive glass
reactive ion etching
surface topography wet chemical etching |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2410070307016.820377260113 (URN) |
Further information |
In: Solids(4), H. 3, S.213-234 - ISSN 2673-6497 |
Record ID |
1344138179 |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: