Title |
Out‐Diffusion and Uphill‐Diffusion of Mg in Czochralski‐Grown (100) β‐Ga 2 O 3 Under High‐Temperature Annealing and Its Influence on Lateral MOSFET Devices |
|---|---|
Involved |
Ta-Shun Chou (Verfasser)
Thi Thuy Vi Tran (Verfasser) Hartwin Peelaers (Verfasser) Kornelius Tetzner (Verfasser)
Oliver Hilt (Verfasser)
Jana Rehm (Verfasser) Saud Bin Anooz (Verfasser) Andreas Fiedler (Verfasser) Zbigniew Galazka (Verfasser) Martin Albrecht (Verfasser) Andreas Popp (Verfasser) |
Published in |
Advanced electronic materials 22.10.2024 |
Published |
22.10.2024 |
Language |
|
Country |
|
Subject |
β‐Ga2O3 |
Persistent identifier |
urn:nbn:de:101:1-2410231412484.790596664815 (URN) |
Record ID |
134586115X |
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