Title |
In Situ X‐Ray Photoelectron Spectroscopy Study of Atomic Layer Deposited Cerium Oxide on SiO 2: Substrate Influence on the Reaction Mechanism During the Early Stages of Growth |
|---|---|
Involved |
Carlos Morales (Verfasser)
Max Gertig (Verfasser) Małgorzata Kot (Verfasser) Carlos Alvarado (Verfasser)
Markus Andreas Schubert (Verfasser)
Marvin Hartwig Zoellner (Verfasser) Christian Wenger (Verfasser) Karsten Henkel (Verfasser) Jan Ingo Flege (Verfasser) |
Published in |
Advanced materials interfaces 31.10.2024 |
Published |
31.10.2024 |
Language |
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Country |
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Subject |
ALD |
Persistent identifier |
urn:nbn:de:101:1-2410311324021.143504760192 (URN) |
Record ID |
1346825459 |
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