Title |
Comparison of aluminum nitride thin films prepared by magnetron sputter epitaxy in nitrogen and ammonia atmosphere |
|---|---|
Involved |
Balasubramanian Sundarapandian (Verfasser)
Dat Q. Tran (Verfasser) Lutz Kirste (Verfasser) Patrik Straňák (Verfasser)
Andreas Graff (Verfasser)
Mario Prescher (Verfasser) Akash Nair (Verfasser) Mohit Raghuwanshi (Verfasser) Vanya Darakchieva (Verfasser) Plamen P. Paskov (Verfasser) Oliver Ambacher (Verfasser) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Language |
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Country |
|
Topic |
|
DDC notation |
|
Persistent identifier |
urn:nbn:de:bsz:25-freidok-2582347 (URN) |
Further information |
Applied physics letters. - 124, 18 (2024) , 182101, ISSN: 1077-3118 |
Record ID |
1348590394 |
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