Title |
OES-Datenerfassung in reaktiven HPPMS-Prozessen und Datenanalyse mittels künstlicher neuronaler Netze / Christoph Franz Robert Schulze ; Kirsten Bobzin, Rainer Dahlmann |
|---|---|
Involved |
Christoph Franz Robert Schulze (Verfasser) |
Published |
Aachen: Universitätsbibliothek der RWTH Aachen |
Extent |
Online-Ressource |
Thesis |
Dissertation, RWTH Aachen University, 2024 |
Language |
|
Country |
|
Topic |
|
Subject |
Hochleistungsimpulsmagnetronsputtern, Chargenbetrieb, Prozessüberwachung, Atomemissionsspektroskopie, Datenanalyse, Neuronales Netz |
DDC notation |
|
Series |
Düren : Shaker Verlag, 2025 (Schriftenreihe Oberflächentechnik; 83) |
Persistent identifier |
urn:nbn:de:101:1-2503260034382.051315967380 (URN) |
Record ID |
1361333588 |
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