Title |
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100) / Jaqueline Stauffenberg, Johannes Belkner, Denis Dontsov, Ludwig Herzog, Steffen Hesse, Ivo W. Rangelow, Ingo Ortlepp, Thomas Kissinger, Eberhard Manske |
|---|---|
Involved |
Jaqueline Stauffenberg (Verfasser)
Johannes Belkner (Verfasser) Denis Dontsov (Verfasser) Ludwig Herzog (Verfasser)
Steffen Hesse (Verfasser)
Ivo W. Rangelow (Verfasser) Ingo Ortlepp (Verfasser) Thomas Kissinger (Verfasser) Eberhard Manske (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 14 Seiten |
Language |
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Country |
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Topic |
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Subject |
active microcantilevers |
DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2508110307090.554474295801 (URN) |
Further information |
In: Measurement science and technology(35), H. 8 - ISSN 1361-6501 |
Record ID |
1373498412 |
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