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Ivo W. Rangelow

Hochschullehrer

Name	Ivo W. Rangelow
Place	Münster (Westf) (Wirkungsort) Berlin (Wirkungsort) Kassel (Wirkungsort) München (Wirkungsort) Wien (Wirkungsort) Berkeley, Calif. (Wirkungsort) Ilmenau (Wirkungsort) Deutschland
Gender	männlich
Academic degree	Prof. Dr.-Ing.
Profession	Hochschullehrer (characteristic profession)
Variant	Iwo Rangelow I. W. Rangelow Iwajlo Rangelow Ivaylo W. Rangelow
Related	Technische Universität Ilmenau. Fachgebiet Mikro- und Nanoelektronische Systeme (2006-2018) Universität Kassel (1985-2005)
Further information	Arbeitsgruppe Nanoskalige Systeme, Technische Universität Ilmenau
Record type	Person
GND-Identifier	137611803
Record ID	137611803
Involved in show all Multiscale Fabrication and Characterization of a NEMS Force Sensor Active Probe Atomic Force Microscopy : A Practical Guide on Precision Instrumentation Fabrication of focused ion beam-deposited nanowire probes for conductive atomic force microscopy Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100) Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy Underlying physics of thermal actuation in composite MEMS Measurement precision of a planar nanopositioning machine with a range of motion of Ø100 mm Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas Heterodyne Standing-Wave Interferometer with Improved Phase Stability Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy Heterodyne standing-wave interferometer with improved phase stability Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) Phase-modulated standing wave interferometer Tip- and laser-based 3D nanofabrication in extended macroscopic working areas Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching Feldemissions-Rastersondenlithographie mittels Diamantspitzen zur Erzeugung von sub-10 nm Strukturen Fully integrated transducer platform with cavity optomechanical readout Investigations on long-range AFM scans using a nanofabrication machine (NFM-100) Phase-modulated standing wave interferometer Scanning probe lithography on calixarene towards single-digit nanometer fabrication Atomic layer etching of SiO 2 with Ar and CHF 3 plasmas: A self‐limiting process for aspect ratio independent etching Lights out! Nano-scale topography imaging of sample surface in opaque liquid environments with coated active cantilever probes Sensitivity improvement to active piezoresistive AFM probes using focused ion beam processing Theoretical investigation of scanning probe lithography in field-emission mode Charged particle single nanometre manufacturing Field emission scanning probe lithography on molecular resist Gas-flow sensor based on self-oscillating and self-sensing cantilever Realisierung der Steuerungs-/Regelungsalgorithmen mittels FPGA für ein hochauflösendes und schnelles Rasterkraftmikroskop mit aktivem Cantilever Low frequency measurements using piezoresistive cantilever MEMS devices – the problem of thermal drift Review Article: Active scanning probes: a versatile toolkit for fast imaging and emerging nanofabrication The spring constant calibration of the piezoresistive cantilever based biosensor Scanning probe-based high-accuracy overlay alignment concept for lithography applications Multi-Eigenmode Control for Improved Tracking Speed in Multifrequency Atomic Force Microscopy Profile simulations of plasma etching of silicon under consideration of charging effect and cryogenic condition Thermographischer Detektor basierend auf einem neuartigen Mikro-Spiegel Sensor Eine Nanopositioniervorrichtung mit integrierten piezoresistiven Sensoren für Hochgeschwindigkeits-Rastersondenmikroskopie-Anwendungen Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system Modellierung von Transportprozessen neutraler und ionisierter Spezies in mikro- und nanostrukturierenden Ätzprozessen Single ion impact detection & scanning probe aligned ion implantation for quantum bit formation Imaging Cellular and Viral Materials with Small Cantilevers Developed for High Speed Atomic Force Microscopy Raster-Sonden-Mikroskopie mit Cantilever-Arrays (Scanning Probe Microscopy with Cantilever Arrays)

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Katalog der Deutschen Nationalbibliothek

Ivo W. Rangelow

Multiscale Fabrication and Characterization of a NEMS Force Sensor

Active Probe Atomic Force Microscopy : A Practical Guide on Precision Instrumentation

Fabrication of focused ion beam-deposited nanowire probes for conductive atomic force microscopy

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

Underlying physics of thermal actuation in composite MEMS

Measurement precision of a planar nanopositioning machine with a range of motion of Ø100 mm

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Heterodyne Standing-Wave Interferometer with Improved Phase Stability

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Heterodyne standing-wave interferometer with improved phase stability

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Phase-modulated standing wave interferometer

Tip- and laser-based 3D nanofabrication in extended macroscopic working areas

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching

Feldemissions-Rastersondenlithographie mittels Diamantspitzen zur Erzeugung von sub-10 nm Strukturen

Fully integrated transducer platform with cavity optomechanical readout

Investigations on long-range AFM scans using a nanofabrication machine (NFM-100)

Phase-modulated standing wave interferometer

Scanning probe lithography on calixarene towards single-digit nanometer fabrication

Atomic layer etching of SiO 2 with Ar and CHF 3 plasmas: A self‐limiting process for aspect ratio independent etching

Lights out! Nano-scale topography imaging of sample surface in opaque liquid environments with coated active cantilever probes

Sensitivity improvement to active piezoresistive AFM probes using focused ion beam processing

Theoretical investigation of scanning probe lithography in field-emission mode

Charged particle single nanometre manufacturing

Field emission scanning probe lithography on molecular resist

Gas-flow sensor based on self-oscillating and self-sensing cantilever

Realisierung der Steuerungs-/Regelungsalgorithmen mittels FPGA für ein hochauflösendes und schnelles Rasterkraftmikroskop mit aktivem Cantilever

Low frequency measurements using piezoresistive cantilever MEMS devices – the problem of thermal drift

Review Article: Active scanning probes: a versatile toolkit for fast imaging and emerging nanofabrication

The spring constant calibration of the piezoresistive cantilever based biosensor

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Multi-Eigenmode Control for Improved Tracking Speed in Multifrequency Atomic Force Microscopy

Profile simulations of plasma etching of silicon under consideration of charging effect and cryogenic condition

Thermographischer Detektor basierend auf einem neuartigen Mikro-Spiegel Sensor

Eine Nanopositioniervorrichtung mit integrierten piezoresistiven Sensoren für Hochgeschwindigkeits-Rastersondenmikroskopie-Anwendungen

Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system

Modellierung von Transportprozessen neutraler und ionisierter Spezies in mikro- und nanostrukturierenden Ätzprozessen

Single ion impact detection & scanning probe aligned ion implantation for quantum bit formation

Imaging Cellular and Viral Materials with Small Cantilevers Developed for High Speed Atomic Force Microscopy

Raster-Sonden-Mikroskopie mit Cantilever-Arrays (Scanning Probe Microscopy with Cantilever Arrays)