Title |
Advanced manufacturing techniques for amorphous silicon carbide (a-SiC:H): optimized deposition and etching processes for micro-optical element fabrication / Thomas Handte, Sebastian Bohm, Arne Behrens, Patrick Feßer, Julian Wüster, Marvin Henkel, Steffen Strehle, Erich Runge, Stefan Sinzinger |
|---|---|
Involved |
Thomas Handte (Verfasser)
Sebastian Bohm (Verfasser) Arne Behrens (Verfasser) Patrick Feßer (Verfasser)
Julian Wüster (Verfasser)
Marvin Henkel (Verfasser) Steffen Strehle (Verfasser) Erich Runge (Verfasser) Stefan Sinzinger (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 21 Seiten |
Language |
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Country |
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Topic |
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DDC notation |
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Persistent identifier |
urn:nbn:de:101:1-2511030206474.229176376310 (URN) |
Further information |
In: Optical materials express(15), H. 1, S.74-94 - ISSN 2159-3930 |
Record ID |
1380560241 |
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