Title |
Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride / Ioannis Lampouras, Mathias Holz, Steffen Strehle, Julia Körner |
|---|---|
Involved |
Ioannis Lampouras (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 14 Seiten |
Language |
|
Country |
|
Topic |
|
Subject |
batch-fabrication
cantilever sensors co-resonant sensitivity enhancement geometric eigenfrequency matching
microcantilever and high aspect ratio nanocantilever
microfabrication silicon nitride MEMS |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2511030208465.690497151656 (URN) |
Further information |
In: Measurement science and technology(34), H. 1 - ISSN 1361-6501 |
Record ID |
1380560519 |
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