Title |
Binary and ternary metal alloys as diffusion barriers in advanced copper interconnects. / Bettina Wehring ; Gutachter: Christoph Leyens, Stefan E. Schulz ; Betreuer: Christoph Leyens |
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Involved |
Bettina Wehring (Verfasser) |
Published |
Dresden: Technische Universität Dresden |
Extent |
Online-Ressource |
Thesis |
Dissertation, Dresden, Technische Universität Dresden, 2025 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
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Record ID |
1385989378 |
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