Title |
Ultralow expansion glass as material for advanced micromechanical systems / Christoph Weigel, Valeriya Cherkasova, Mathias Holz, Hai Binh Phi, Christian Görner Tenorio, Björn Wilbertz, Leonard Voßgrag, Thomas Fröhlich, Steffen Strehle |
|---|---|
Involved |
Christoph Weigel (Verfasser)
Valeriya Cherkasova (Verfasser) Mathias Holz (Verfasser) Hai Binh Phi (Verfasser)
Christian Görner Tenorio (Verfasser)
Björn Wilbertz (Verfasser) Leonard Voßgrag (Verfasser) Thomas Fröhlich (Verfasser) Steffen Strehle (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 14 Seiten |
Language |
|
Country |
|
Topic |
|
Subject |
cantilever
glass-based microsystems microelectromechanical systems (MEMS) precision measurement
reactive ion etching
reactive ion etching ultralow expansion glass |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2603090210479.220455496896 (URN) |
Further information |
In: Advanced engineering materials(25), H. 9, S.1-14 - ISSN 1527-2648 |
Record ID |
1392420865 |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: