Title |
Untersuchungen an Methylacrylsäuremethylester-Methylacrylsäure-Copolymerisaten als Positiv-Resiste in der Elektronenstrahllithographie / von Brigitte Rapsch [geb. Pradel] |
|---|---|
Involved |
Brigitte Rapsch (Verfasser) |
Published |
1985 |
Extent |
105 Bl. : graph. Darst. |
Thesis |
Berlin, Akad. der Wiss. der DDR, Diss. A, 1986. |
Topic |
|
Subject |
|
Further information |
Nicht für den Austausch |
Record ID |
212417614 |
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