Katalog der Deutschen Nationalbibliothek

Go to:

Media

Multipart item
Multipart item
For availability details display full record

Rainer Behrisch

Sputtering by particle bombardment

Berlin, Heidelberg, New York, London, Paris, Tokyo, Hong Kong, Barcelona, Budapest: Springer

Title

Sputtering by particle bombardment / ed. by R. Behrisch and K. Wittmaack

Involved 

Rainer Behrisch (Herausgeber)

Published

Berlin, Heidelberg, New York, London, Paris, Tokyo, Hong Kong, Barcelona, Budapest: Springer

Topic

Astronomie, Kartografie
Physik

Subject

Sputtern

Further information

Literaturangaben

Record ID

550826459

Parts

show all

Sputtering by particle bombardment

1. Physical sputtering of single-element solids

Sputtering by particle bombardment

2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography

Sputtering by particle bombardment

3. Characteristics of sputtered particles, technical applications
Please note

The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link:

DNB portal