Title |
Chemische Dampfablagerung : CVD-Grundlagen für d. Mikroelektronik / Heinrich Arnold |
|---|---|
Involved |
Heinrich Arnold (Verfasser) |
Published |
Berlin: Akademie-Verlag |
Extent |
158 S. : graph. Darst. |
Country |
|
Topic |
|
Subject |
|
Further information |
Literaturverz. S. 145 - 152. - Vom Ms. gedr. |
Record ID |
821069713 |
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