Title |
Sputtering by particle bombardment. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography / with contributions by R. Behrisch ... |
|---|---|
Involved |
Rainer Behrisch (Herausgeber) |
Published |
Berlin, Heidelberg, New York, London, Paris, Tokyo, Hong Kong, Barcelona, Budapest: Springer |
Extent |
XI, 391 S. : 155 Ill. u. graph. Darst. |
ISBN |
978-3-540-12593-8 |
Topic |
|
Subject |
Ionenbestrahlung |
Series |
Topics in applied physics ; Vol. 52 |
Part of |
|
Record ID |
830859918 |
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