Title |
Die Ladungsträgerbeweglichkeit in röntgenlithographisch hergestellten Submikron-MOS-Transistoren |
|---|---|
Involved |
Hans-Jürgen Wildau (Verfasser) |
Published |
1993 |
Extent |
2 Mikrofiches : 24x |
Thesis |
Berlin, Techn. Univ., Diss., 1993 (Nur als Mikrofiche für den Austausch) |
Topic |
|
Subject |
|
Further information |
Mikroreprod. eines Ms. Getr. Zählung : graph. Darst. |
Record ID |
931877261 |
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