Title |
Untersuchungen zur Formierung von Silizium-Kobaltdisilizid-Schichtsystemen durch Hochdosisionenimplantation und thermische Nachbehandlung |
|---|---|
Involved |
Stefan Schippel (Verfasser) |
Published |
1993 |
Extent |
112 Bl. : Ill., graph. Darst. |
Thesis |
Jena, Univ., Diss., 1993 |
Language |
|
Topic |
|
Subject |
|
Record ID |
931997003 |
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