Title |
Aufbau piezoresistiver Niederdrucksensoren aus Silicium / Henderikus Lammert Offereins |
|---|---|
Involved |
Henderikus Lammert Offereins (Verfasser) |
Published |
Aachen: Shaker |
Edition |
Als Ms. gedr. |
Extent |
IV, 148 S. : Ill., graph. Darst. |
Thesis |
Zugl.: München, Techn. Univ., Diss., 1993 |
ISBN |
978-3-86111-961-6 |
Topic |
|
Subject |
|
Series |
Berichte aus der Halbleitertechnik |
Record ID |
940954052 |
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