Title |
Untersuchung von Si+-implantiertem Silizium mit Röntgenbeugung unter streifendem Ein- und Ausfallswinkel / vorgelegt von Stefan Rugel |
|---|---|
Involved |
Stefan Rugel (Verfasser) |
Published |
1992 |
Extent |
46 S. : graph. Darst., Ill. |
Thesis |
München, Univ., Diss., 1992 |
Topic |
|
Subject |
Silicium, Dotierung, Siliciumion, Kation, Röntgenbeugung, Streifender Einfall |
Record ID |
943429323 |
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