Title |
In-situ-Charakterisierung und Ladungsträgerkinetik amorpher Halbleiter auf Silicium-Basis / von Carsten Swiatkowski |
|---|---|
Involved |
Carsten Swiatkowski (Verfasser) |
Published |
1995 |
Extent |
II, 145 S. : Ill., graph. Darst. |
Thesis |
Berlin, Techn. Univ., Diss., 1996 |
Topic |
|
Subject |
Silicium, Amorpher Halbleiter, PECVD-Verfahren, Ladungsträgerbeweglichkeit |
Record ID |
948436670 |
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