Title |
Theorie und Computersimulation der Ostwald-Reifung bei der Ionenstrahlsynthese / von Stefan Reiss |
|---|---|
Involved |
Stefan Reiss (Verfasser) |
Published |
1996 |
Extent |
128 S. : Ill., graph. Darst. |
Thesis |
Dresden, Univ., Diss., 1996 |
Language |
|
Topic |
|
Subject |
Siliciumhalbleiter, Vergrabene Schicht, Ionenimplantation, Ausheilung, Ostwald-Reifung |
Record ID |
948588152 |
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