Title |
Semiconductor wafer bonding: science, technology and applications : proceedings of the First International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications : [Phoenix, AZ, October 13 - 18, 1991] / Electrochemical Society. Ed. by Ulrich Gösele ... |
|---|---|
Involved |
International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications (1, 1991, Phoenix, Ariz.) (Verfasser) |
Published |
Pennington, NJ: Electrochemical Soc. |
Extent |
IX, 498 S. : Ill., graph. Darst. |
ISBN |
1-56677-008-4 |
Language |
|
Country |
|
Part of |
Proceedings / Electronics and Dielectric Science and Technology Divisions, Electrochemical Society ; Vol. 92,7 |
Further information |
Literaturangaben |
Record ID |
948664266 |
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